• SRAF, CXMT & ASML https://spiedigitallibrary.org/conference-proceedings-of-spie/10961/1096108/Full-chip-application-of-machine...
  • PDFs https://ebeam.org/docs/eBeam-Luminaries-Survey-2020.pdf… https://ebeam.org/docs/eBeam-Mask-Maker-Survey-2020.pdf…
  • ebeam.org/docs/ebeam_bacus_2017_roundup_jp.pdf… メンバー:40社 75%:EUVは 2020年末までに量産化.
  • => "Machine Learning in Computational Lithography", ASML, SPIE eBeam lunch Talk, Feb 26 2019 19:59 https://youtube.com/watch?v=kfXBUtKHTnc…
  • ebeam.org/docs/ebeam_bacus_2017_roundup_jp.pdf… メンバー:40社 75%:EUVは 2020年末までに量産化.
  • ebeam.org/docs/ebeam_bacus_2017_roundup_jp.pdf… メンバー:40社 75%:EUVは 2020年末までに量産化.